Whitepapers

Shielding Charged Particle Emission from Ion Pumps

Executive Summary

This Technical Overview presents a study of the emission of charged particles from ion getter vacuum pumps (IGP) and the design and testing of particle shielding, with the goal of maximizing shielding while minimizing the effect on pumping speed.  The first aim was to understand the degree to which particles are emitted from an IGP, followed by design of a shielding method.  Results of comparative testing of Agilent IGP and competitor pump of equivalent size are described.